Microstructured fluid flow control device

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United States of America Patent

PATENT NO 11555725
APP PUB NO 20210041280A1
SERIAL NO

16942558

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Abstract

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A microstructured fluid flow control device includes a substrate with a piezo-actuated first membrane arranged on a first substrate side, and a fluid channel that extends through the substrate between the first substrate side and an opposite second substrate side. In addition, the microstructured fluid flow control device includes a microvalve that extends through the fluid channel and is configured to close the fluid channel in an unactuated state, and a second membrane arranged on the first substrate side and spaced apart from the membrane and arranged between the fluid channel and the first piezo-actuated membrane. The second membrane is joined to the microvalve and is mechanically biased towards the first membrane so that a biasing force is applied to the microvalve, wherein the biasing force is part of a restoring force that causes the microvalve to close the fluid channel in an unactuated state.

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Patent Owner(s)

Patent OwnerAddress
FRAUNHOFER-GESELLSCHAFT ZUR FORDERUNG DER ANGEWANDTEN FORSCHUNG E VHANSASTRABE 27C MUNCHEN 80686

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Congar, Yuecel Munich, DE 6 14
Kibler, Sebastian Munich, DE 11 70
Wackerle, Martin Munich, DE 15 131
Wald, Christian Munich, DE 18 128

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