Method and apparatus for aligning a probe for scanning probe microscopy to the tip of a pointed sample

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United States of America Patent

PATENT NO 11549963
SERIAL NO

17414207

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Abstract

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Example embodiments relate to methods and apparatuses for aligning a probe for scanning probe microscopy (SPM) to the tip of a pointed sample. One embodiments includes a method for aligning an SPM probe to an apex area of a free-standing tip of a pointed sample. The method includes providing an SPM apparatus that includes the SPM probe; a sample holder; a drive mechanism; and detection, control, and representation tools for acquiring and representing an image of a surface scanned by the SPM probe. The method also includes mounting the sample on the sample holder. Further, the method includes positioning the probe tip of the SPM, determining a 2-dimensional area that includes the pointed sample, performing an SPM acquisition scan, evaluating and acquired image, and placing the SPM probe in a position where it is aligned with an apex area of the free-standing tip of the pointed sample.

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Patent Owner(s)

Patent OwnerAddress
IMEC VZWLEUVEN LEUVEN FLEMISH BRABANT

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fleischmann, Claudia Bertem, BE 2 2
Op, de Beeck Jonathan Zonhoven, BE 1 0
Paredis, Kristof Oud-Heverlee, BE 7 3
Vandervorst, Wilfried Mechelen, BE 31 411

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