Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11540432
APP PUB NO 20210100141A1
SERIAL NO

16890336

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Abstract

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Disclosed in some embodiments is a chamber component (such as an end effector body) coated with an ultrathin electrically-dissipative material to provide a dissipative path from the coating to the ground. The coating may be deposited via a chemical precursor deposition to provide a uniform, conformal, and porosity free coating in a cost effective manner. In an embodiment wherein the chamber component comprises an end effector body, the end effector body may further comprise replaceable contact pads for supporting a substrate and the contact surface of the contact pads head may also be coated with an electrically-dissipative material.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INC3050 BOWERS AVENUE SANTA CLARA CA 95054

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bajaj, Geetika Mumbai, IN 44 473
Dhayalan, Arun Austin, US 4 2
Fenwick, David Los Altos Hills, US 34 1768
Goradia, Prerna Mumbai, IN 40 745
He, XiaoMing Fremont, US 48 2380
Hudgens, Jeff San Francisco, US 14 173
Muthukamatchy, Karuppasamy Madurai, IN 6 12
Natu, Gayatri Mumbai, IN 10 4
Seppaelae, Sanni Karlstein am Main, DE 5 2
Sun, Jennifer Fremont, US 21 1292
Thakare, Darshan Maharashtra, IN 17 296
Thanu, Rajkumar Santa Clara, US 21 40

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