Photomask assembly with reflective photomask and method of manufacturing a reflective photomask

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United States of America Patent

PATENT NO 11537039
APP PUB NO 20200225571A1
SERIAL NO

16739555

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Abstract

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A photomask mask assembly includes a reflective photomask and a protection structure. The reflective photomask includes a substrate and a reflective multilayer on a first substrate surface of the substrate at a front side of the reflective photomask. The protection structure is on a second substrate surface of the substrate at a backside of the reflective photomask, and is detachable from the reflective photomask at a temperature below 150 degree Celsius.

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Patent Owner(s)

Patent OwnerAddress
ADVANCED MASK TECHNOLOGY CENTER GMBH & CO KG01109 DRESDEN

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bender, Markus Dresden, DE 7 19
Schedel, Thorsten Dresden, DE 20 168
Schenke, Andreas Langebrueck, DE 3 6

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