Surface shape measuring device and surface shape measuring method
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United States of America Patent
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Dec 13, 2022
Grant Date -
Sep 1, 2022
app pub date -
May 20, 2022
filing date -
Nov 22, 2019
priority date (Note) -
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status (Latency Note)
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Abstract
When an index table is installed on a rotary table in a surface shape measuring device, deterioration in measurement accuracy can be suppressed. The surface shape measuring device includes: a rotary table which is configured to place a workpiece thereon and to be freely rotatable around a rotation center axis; and a detector configured to detect a displacement of a probe brought into contact with the workpiece. The rotary table has a centering mechanism configured to align a center axis of the workpiece and the rotation center axis. An index table freely detachably mounted on the rotary table is provided, the index table configured so as to be able to perform indexing along a first axis and a second axis which are perpendicular to the rotation center axis. Eccentric load cancelling means configured to cancel an eccentric load caused by the indexing of the index table is provided.
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