Conductive porous ceramic substrate and method of manufacturing same

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United States of America Patent

PATENT NO 11521889
SERIAL NO

16457152

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Abstract

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The present invention relates to a conductive porous ceramic substrate and a method of manufacturing the same, and more particularly to a conductive porous ceramic substrate, in which a porous ceramic substrate used as a chuck or stage for fixing a thin semiconductor wafer substrate or display substrate through vacuum adsorption is imparted with antistatic performance so as to prevent the generation of static electricity, and a method of manufacturing the same.

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Patent Owner(s)

Patent OwnerAddress
TRI-N CO LTD25-3 CHEOMDANGIEOP 4-RO SANDONG-MYEON GYEONGSANGBUK-DO GUMI

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Baik, Seung Woo Daegu, KR 1 2
Choi, June Beom Chilgok-gun, KR 1 2
Jung, Jong Yeol Daegu, KR 1 2
Kim, Byoung Hak Daegu, KR 19 117
Kim, Gyu Ha Daegu, KR 2 3
Kim, In Woong Daegu, KR 2 2
Lee, Chun Moo Daegu, KR 1 2
Shin, In Bum Gumi, KR 1 2

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