Wafer boat handling device, vertical batch furnace and method
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United States of America Patent
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-
Nov 29, 2022
Grant Date -
Nov 19, 2020
app pub date -
May 13, 2020
filing date -
May 16, 2019
priority date (Note) -
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status (Latency Note)
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Abstract
Wafer boat handling device, configured to be positioned under a process chamber of a vertical batch furnace, and comprising a rotatable table comprising a first and a second wafer boat support surface. Each wafer boat support surface is configured for supporting a wafer boat. The rotatable table is rotatable by an actuator to rotate both the first and the second wafer support surfaces to a load/receive position in which the wafer boat handling device is configured to load a wafer boat vertically from the rotatable table into the process chamber and to receive the wafer boat from the process chamber onto the rotatable table, a cooldown position in which the wafer boat handling device is configured to cool down a wafer boat, and a transfer position for transferring wafers to and/or from the wafer boat.
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