End effectors for moving workpieces and replaceable parts within a system for processing workpieces under vacuum

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11515127
APP PUB NO 20200361094A1
SERIAL NO

15930924

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An end effector for moving workpieces and replaceable parts within a system for processing workpieces. The end effector may include an arm portion extending between a first arm end and a second arm end along the axial direction. The end effector may further include a spatula portion extending between a first spatula end and a second spatula end, the first spatula end being adjacent the second arm end. Further, the end effector may include a first support member extending outwardly from the spatula portion, a second support member extending outwardly from the spatula portion, and a shared support member extending outwardly from the arm portion. The shared support member and the first support member together to support workpieces of a first diameter, and the shared support member and the second support member together support replaceable parts of a second diameter.

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Patent Owner(s)

Patent OwnerAddress
MATTSON TECHNOLOGY INC47131 BAYSIDE PARKWAY FREMONT CA 94538
BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO LTDNO 8 BUILDING NO 28 JINGHAI ER RD ECONOMIC AND TECHNICAL DEVELOPMENT ZONE BEJING 100176

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Lembesis, Peter J Boulder Creek, US 8 8
Pakulski, Ryan M Brentwood, US 17 83
Zucker, Martin L Orinda, US 15 1089

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