Process gas suction structure and exhaust gas treatment apparatus

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United States of America Patent

PATENT NO 11511226
SERIAL NO

17522329

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Abstract

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A process gas suction structure for preventing a generation of products from a process gas due to a temperature drop is disclosed. The process gas suction structure includes a double tube structure, and a heating device configured to heat the double tube structure. The double tube structure includes a process-gas flow passage portion where the process gas flows, and a partition portion arranged outside of the process-gas flow passage portion.

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Patent Owner(s)

Patent OwnerAddress
EBARA CORPORATION11-1 HANEDA ASAHI-CHO OTA-KU TOKYO 1448510 ?1448510

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Miyazaki, Kazutomo Tokyo, JP 14 27
Sekine, Takafumi Tokyo, JP 4 5

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