Surface treatment compositions and methods

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11508569
APP PUB NO 20210057210A1
SERIAL NO

16983119

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Abstract

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This disclosure relates to methods and compositions for treating a semiconductor substrate having a pattern disposed on a surface of the substrate. The methods can include a) supplying a sublimating material to a substrate having a pattern disposed on a surface thereof; b) maintaining the sublimating material on the surface for a time sufficient to modify the surface; c) solidifying the sublimating material on the surface; and d) removing by sublimation the sublimating material disposed on the surface.

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Patent Owner(s)

Patent OwnerAddress
FUJIFILM ELECTRONIC MATERIALS U S A INCNORTH KINGSTOWN RI 02852

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Dory, Thomas Gilbert, US 31 124
Mizutani, Atsushi Shizuoka, JP 129 834
Park, Keeyoung Gilbert, US 17 48
Takahashi, Kazutaka Gilbert, US 67 394
Wojtczak, William A Mesa, US 58 835

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