Focus ring adjustment assembly of a system for processing workpieces under vacuum
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United States of America Patent
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Nov 22, 2022
Grant Date -
Nov 19, 2020
app pub date -
May 13, 2020
filing date -
May 14, 2019
priority date (Note) -
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status (Latency Note)
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Abstract
A focus ring adjustment assembly of a system for processing workpieces under vacuum, where the focus ring may include a lower side having a first surface portion and a second surface portion, the first surface portion being vertically above the second surface portion. The adjustment assembly may include a pin configured to selectively contact the first surface portion of the focus ring, and an actuator operable to move the pin along the vertical direction between an extended position and a retracted position. The extended position of the pin may be associated with the distal end of the pin contacting the first surface of the focus ring and the focus ring being accessible for removal by a workpiece handling robot from the vacuum process chamber.
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