Memory device with predetermined start-up value

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United States of America Patent

PATENT NO 11501952
APP PUB NO 20200203125A1
SERIAL NO

16805509

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Abstract

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A method for making a semiconductor memory device comprising a plurality of memory cells for storing one or more data values, the method comprising: exposing a pattern on a wafer for creating structures for a plurality of memory cells for the semiconductor memory device, wherein the pattern is exposed by means of one or more charged particle beams; and varying an exposure dose of the one or more charged particle beams during exposure of the pattern to generate a set of one or more non-common features in one or more structures of at least one of the memory cells, so that the structures of the at least one memory cell differ from the corresponding structures of other memory cells of the semiconductor memory device.

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Patent Owner(s)

Patent OwnerAddress
ASML NETHERLANDS B VDE RUN 6501 VELDHOVEN NL - 5504 DR

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Van, Kervinck Marcel Nicolaas Jacobus Delft, NL 25 77
Wieland, Marco Jan-Jaco Delft, NL 104 1084

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