Side inject designs for improved radical concentrations

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11501945
APP PUB NO 20210074505A1
SERIAL NO

17102051

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Abstract

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In one example, a chamber inlet assembly includes a chamber inlet, an outer coupling for a delivery line, and an inner coupling for a processing region of a processing chamber. The inner coupling and the outer coupling are on inner and outer ends, respectively, of the chamber inlet, wherein a cross-sectional area of the inner coupling is larger than a cross-sectional area of the outer coupling. The chamber inlet assembly also includes a longitudinal profile including the inner and outer ends and a first side and a second side, the first and second sides being on opposite sides of the chamber inlet, wherein a shape of the longitudinal profile comprises at least one of triangular, modified triangular, trapezoidal, modified trapezoidal, rectangular, modified rectangular, rhomboidal, and modified rhomboidal. The chamber inlet assembly also includes cassette including the chamber inlet and configured to set into a side wall of the processing chamber.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INC3050 BOWERS AVENUE SANTA CLARA CA 95054

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kaufman-Osborn, Tobin Sunnyvale, US 38 174
Kim, Taewan San Jose, US 96 459
Lo, Hansel San Jose, US 25 27
Olsen, Christopher S Fremont, US 103 3920
Pandey, Vishwas Kumar Madhya Pradesh, IN 50 90
Shono, Eric Kihara San Mateo, US 36 105
Tjandra, Agus Sofian Milpitas, US 22 355

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