Semiconductor apparatus and equipment

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11488998
APP PUB NO 20200343293A1
SERIAL NO

16853592

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Abstract

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A semiconductor apparatus configured to decrease occurrence of exfoliation between a conductor layer and an insulator layer is provided. A first region containing silicon and copper is disposed between a first conductor portion and a first insulator portion. A second region containing silicon and copper is disposed between a second conductor portion and a second insulator portion. The first region has a maximum nitrogen concentration higher than that of the second region.

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Patent Owner(s)

Patent OwnerAddress
CANON KABUSHIKI KAISHAJAPAN

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kanesada, Takayasu Yamato, JP 7 19
Kawano, Akihiro Yokohama, JP 64 582
Suzuki, Yukinobu Koza-gun, JP 14 55

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