Method of preparing ITO ceramic target with controllable grain size

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United States of America Patent

PATENT NO 11486034
APP PUB NO 20210277513A1
SERIAL NO

15930912

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A method of preparing an ITO ceramic target includes that: In2O3 powder with mass fraction of 90˜97 and SnO2 powder with mass fraction of 10˜3 are ball-milled and mixed with deionized water, diluent, binder and polymer material by a sand mill to obtain an ITO ceramic slurry with a solid content between 70˜80% and a viscosity between 120˜300 mpa·s, with an average particle size D50 of the mixed powder controlled at 100˜300 nm; the ITO ceramic slurry is shaped by a pressure grouting to obtain an ITO ceramic green body with a relative density of 58˜62%; the ITO ceramic green body is put into a degreasing and sintering integrated furnace, and under a degreasing temperature of 700˜800° C., the ITO ceramic target is degreased in an atmospheric oxygen atmosphere for the time set to 12˜36 hours; the temperature increases from the degreasing temperature to the first sintering temperature of 1,600˜1,650° C.

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Patent Owner(s)

Patent OwnerAddress
ZHENGZHOU UNIVERSITYNO 100 SCIENCE AVENUE HIGH-TECH ZONE ZHENGZHOU 450001

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Jie Zhengzhou, CN 1059 5911
He, Jilin Zhengzhou, CN 7 53
Liu, Yang Zhengzhou, CN 1941 7962
Shu, Yongchun Zhengzhou, CN 3 0
Sun, Benshuang Zhengzhou, CN 3 0
Zeng, Xueyun Zhengzhou, CN 3 0

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