Permeation barrier layer
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United States of America Patent
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Nov 1, 2022
Grant Date -
May 1, 2014
app pub date -
Jan 6, 2014
filing date -
Jan 25, 2008
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Abstract
A sealable volume has a wall forming at least a portion of a boundary limiting the volume. The wall includes a hydrogen permeation barrier including a layer system (LS) having at least one layer. The layer system includes at least one hydrogen barrier layer (HPBL) of an at least ternary oxide. Preferably, the oxide is substantially composed of Al, Cr and O and the hydrogen barrier layer (HPBL) is deposited using physical vapor deposition, in particular cathodic arc evaporation. Preferably, the layer system includes at least one of: an adhesion layer (AdhL), a hydrogen storage layer (HStL), a protective layer (ProtL), in particular a thermal barrier layer (ThBL), a diffusion barrier layer (DBL), an oxidation barrier layer (OxBL), a chemical barrier layer (ChBL), a wear resistance layer (WRL). Excellent hydrogen permeation barrier properties can be achieved, and the layer system can be tailored as required by an envisaged application.
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