Vacuum system with a multi-stage and multi-inlet vacuum pump with a directional element separating pump stages

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11480181
APP PUB NO 20210018004A1
SERIAL NO

16922045

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Abstract

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The invention relates to a vacuum system, comprising a vacuum pump, preferably turbomolecular pump, and at least one vacuum chamber, wherein the vacuum pump comprises: at least a first and a second inlet and a common outlet; at least a first and a second pumping stage, each pumping stage comprising at least one rotor element being arranged on a common rotor shaft, wherein the first inlet is connected to an upstream end of the first pumping stage and the second inlet is connected to an upstream end of the second pumping stage; a direction element for preventing a gas flow from a downstream end of the first pumping stage to the second inlet; a conduit having a conduit inlet and a conduit outlet, wherein the conduit inlet is connected to the downstream end of the first pumping stage and the conduit outlet is connected to a location downstream of the second pumping stage; wherein the first inlet and the second inlet of the pump are connected to the same vacuum chamber.

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Patent Owner(s)

Patent OwnerAddress
AGILENT TECHNOLOGIES INCP O BOX 7599 MS LEGAL LOVELAND CO 80537-0599
PFEIFFER VACUUM GMBH35614 ASSLAR

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bertsch, James L Palo Alto, US 37 1045
Hoffmann, Jan Gruenberg, DE 44 1246
Schweighoefer, Michael Schoeffengrund, DE 5 2
Stoll, Tobias Hohenaar, DE 13 46

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