Wavelength control method of laser apparatus and electronic device manufacturing method
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United States of America Patent
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Oct 11, 2022
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app pub date -
Jun 8, 2021
filing date -
Jan 29, 2019
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Abstract
A wavelength control method of a laser apparatus includes sequentially obtaining target wavelength data of a pulse laser beam, sequentially saving the target wavelength data, sequentially measuring a wavelength of the pulse laser beam to obtain a measured wavelength, calculating a wavelength deviation using the measured wavelength and the target wavelength data at a time before a time when the measured wavelength is obtained, and feedback-controlling the wavelength of the pulse laser beam using the wavelength deviation.
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