Light irradiation device
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United States of America Patent
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Oct 11, 2022
Grant Date -
May 14, 2020
app pub date -
Jul 10, 2018
filing date -
Jul 19, 2017
priority date (Note) -
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Abstract
The present invention has as an object the provision of a light irradiation device capable of performing optical cleaning with high stability regardless of the transport speed of a workpiece. The light irradiation device of the present invention emits ultraviolet light to one surface of a band-shaped workpiece transported along a transport path, and includes a lamp house having an opening along a passing plane on a side of the one surface of the workpiece in the transport path, an ultraviolet lamp provided in the lamp house so as to extend in a width direction of the workpiece, gas supplier configured to supply a treatment-space gas into the lamp house, and an exhaust space forming member having an opening along a passing plane on a side of the other surface of the workpiece in the transport path. The treatment-space gas is produced by mixing a gas containing oxygen and/or water with an inert gas serving as a principal component, and a shielding body for forming a gas circulation resistance bottleneck between the shielding body and each edge part of the workpiece is provided in the opening of the lamp house.
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