Three-dimensional array architecture for resistive change element arrays and methods for making same

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United States of America Patent

PATENT NO 11462686
SERIAL NO

16908277

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Abstract

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A method to fabricate a resistive change element array may include depositing a resistive change material over a substrate and forming a first insulating material over the resistive change material. The method may also include etching a trench in the resistive change material and the first insulating material and forming a cavity in a sidewall of the trench by recessing the resistive change material. The method may further include flowing a conductive material in the cavity and depositing a second insulating material in the trench.

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Patent Owner(s)

Patent OwnerAddress
NANTERO INC25 OLYMPIA AVENUE SUITE B WOBURN MA 01801

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Luan, Harry Shengwen Saratoga, US 14 236
Rueckes, Thomas Byfield, US 210 7753

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