Fluid control system and flow rate measurement method
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United States of America Patent
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Oct 4, 2022
Grant Date -
May 21, 2020
app pub date -
Jul 24, 2018
filing date -
Jul 31, 2017
priority date (Note) -
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Abstract
A fluid control system (1) comprises: a first valve (21) provided downstream of a flow rate controller (10), a flow rate measuring device (30) provided downstream of the first valve (21) and having a second valve (22), an open/close detector (26) provided to the second valve (22), and a controller (25) for controlling an open/close operation of the first valve (21) and the second valve (22), and the controller (25) controls the open/close operation of the first valve (21) in response to a signal output from the open/close detector (26).
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