Hinged microelectromechanical and/or nanoelectromechanical device with out-of-plane movement

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11459227
SERIAL NO

16348004

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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Disclosed is a hinged MEMS and/or NEMS device with out-of-plane movement including a first portion and a second portion that is hinged so as to be able to rotate with respect to the first portion about an axis of rotation contained in a first mean plane of the device. The device also includes a hinging element that connects the first portion and the second portion and that is stressed flexurally and a sensing element that extends between the first portion and the second portion and that deforms during the movement of the second portion. Finally, the device includes two blades that extend perpendicularly to the mean plane of the hinge device and parallel to the axis of rotation, the blades being placed between the hinging element and the sensing element and connecting the first portion and the second portion and being stressed torsionally during the movement of the second portion.

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Patent Owner(s)

Patent OwnerAddress
COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES25 RUE LEBLANC 75015 PARIS 75015

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Berthelot, Audrey Saint Ismier, FR 12 67
Joet, Loic Claix, FR 21 33

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