Systems and methods of operation of capacitive radio frequency micro-electromechanical switches

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United States of America Patent

PATENT NO 11458504
APP PUB NO 20210129187A1
SERIAL NO

16472472

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Abstract

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Disclosed are systems and methods of operation for capacitive radio frequency micro-electromechanical switches, such as CMUT cells for use in an ultrasound system. An RFMEMS may include substrate, a first electrode connected to the substrate, a membrane and a second electrode connected to the membrane. In some examples, there is a dielectric stack between the first and second electrodes. The dielectric stack design minimizes drift in the membrane collapse voltage. In other examples, a voltage supply coupled to an ultrasonic array compressing the CMUT cells is adapted to provide a sequence of voltage profiles to the electrodes of the CMUT cell, wherein each profile includes a bias voltage and a stimulus voltage, and wherein a polarity of each subsequent voltage profile in the sequence is opposite to the polarity of the preceding profile. In another example, there is a capacitance sensing circuit provided, which is arranged to determine a drift voltage of the CMUT cell.

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Patent Owner(s)

Patent OwnerAddress
KONINKLIJKE PHILIPS N VHIGH TECH CAMPUS 52 EINDHOVEN 5656AG

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Budzelaar, Franciscus Paulus Maria Eindhoven, NL 36 214
de, Wild Nico Maris Adriaan Eindhoven, NL 30 83
Dirksen, Peter Hilversum, NL 74 1918
Loebl, Hans-Peter Monschau-Imgenbroich, DE 31 414
Shulepov, Sergei Eindhoven, NL 59 655
Timmermans, Petrus Henricus Maria Teteringen, NL 11 24

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