Light source measurement apparatus
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United States of America Patent
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Sep 27, 2022
Grant Date -
Jul 2, 2020
app pub date -
Dec 12, 2019
filing date -
Dec 26, 2018
priority date (Note) -
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Abstract
A light source measurement apparatus includes an objective lens that collects light emitted from a light source having a plurality of light emission points, a first reflection attenuation filter, a second reflection attenuation filter, a condensing lens, a space filter, and a movable stage, in which the first reflection attenuation filter and the second reflection attenuation filter are disposed such that polarization directions are orthogonal to each other, in which the space filter has an opening through which light emitted from a measurement target light emission point among the plurality of light emission points is transmitted, and in which the opening has a shape in which a dimension of the measurement target light emission point in a fast direction is larger than a dimension of the measurement target light emission point in a slow direction.
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