Method of using a processing oven
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United States of America Patent
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Sep 27, 2022
Grant Date -
N/A
app pub date -
Mar 4, 2022
filing date -
Mar 4, 2022
priority date (Note) -
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status (Latency Note)
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Abstract
A method of using an oven includes supporting a substrate on a rotatable spindle in a processing chamber of the oven and rotating the substrate. The method may also include raising the spindle with the substrate to a heating zone and activating a lamp assembly to heat a top surface of the substrate. The substrate may then be lowered to a dosing zone and a chemical vapor directed into the processing chamber above the substrate. The substrate may then be further heated using the lamp assembly and cooled.
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Cited Art Landscape
Patent Citation Ranking
- 1 Citation Count
- H01L Class
- 65.20 % this patent is cited more than
- 3 Age
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| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 3.5 Year Payment | $1600.00 | $800.00 | $400.00 | Mar 27, 2026 |
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Mar 27, 2030 |
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