Recessed hardmask used to form heat-assisted magnetic recording near-field transducer with heat sink
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United States of America Patent
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Sep 27, 2022
Grant Date -
Jun 27, 2019
app pub date -
Mar 4, 2019
filing date -
Jan 4, 2016
priority date (Note) -
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status (Latency Note)
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Abstract
A method involves depositing a near-field transducer on a substrate of a slider. The near-field transducer comprises a plate-like enlarged portion and a peg portion. A first hard stop extending from the near field transducer and an air bearing surface is formed. A heat sink is formed on the enlarged portion and the first hard stop. A dielectric material is deposited over the near-field transducer and the heat sink. A second hard stop is deposited on the dielectric material away from the air bearing surface. The second hard stop comprises a recess corresponding in size and location to the heat sink. The method involves milling at an oblique angle to the substrate between the first hard stop and second hard stop to cut through the heat sink at the angle. The recess of the second hard stop increases a milling rate over the heat sink compared to a second milling rate of the dielectric away from the heat sink.
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