Gas purge unit and load port apparatus
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United States of America Patent
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Sep 20, 2022
Grant Date -
Jun 6, 2019
app pub date -
Nov 21, 2018
filing date -
Nov 21, 2014
priority date (Note) -
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status (Latency Note)
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Abstract
A gas purge unit introduces a cleaning gas into a purge container with an opening therethrough. The gas purge unit includes a first blowout member second blowout member. The first blowout member is disposed along a lateral the opening and includes a first nozzle port. The first nozzle port blows the cleaning gas into the purge container. The second blowout member is disposed along the lateral side and includes a second nozzle port. The second nozzle port is disposed farther from the opening than the first nozzle port and blows the cleaning gas into the purge container. A load port apparatus includes the gas purge unit.
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