Optical microscope and spectroscopic measurement method

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11442259
APP PUB NO 20200249454A1
SERIAL NO

16640012

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Abstract

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An optical microscope according to one aspect of the present disclosure includes: a light source; a first scanner to scan a spot position of a light beam on a sample; an objective lens to focus the light beam deflected by the first scanner and cause the light beam to be made incident on the sample; a spectroscope including a slit on an incident side which an outgoing light emitted from an area on the sample onto which the light beam has been illuminated enters; a detector configured to detect an outgoing light from the spectroscope; and a first relay optical system including a first off-axis parabolic mirror that is arranged in an optical path from the first scanner to the objective lens and reflects the light beam deflected by the first scanner and a second off-axis parabolic mirror that reflects the light beam reflected in the first off-axis parabolic mirror.

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Patent Owner(s)

  • NANOPHOTON CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kawano, Shogo Osaka, JP 10 22
Kobayashi, Minoru Osaka, JP 159 1530
Matsuzaka, Shunichiro Osaka, JP 1 0
Ota, Taisuke Osaka, JP 7 78
Shiozaki, Yusuke Osaka, JP 2 3
Yamauchi, Shota Osaka, JP 3 0

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