Milling a multi-layered object

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United States of America Patent

PATENT NO 11440151
APP PUB NO 20200384592A1
SERIAL NO

16435367

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Abstract

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A miller, a non-transitory computer readable medium, and a method for milling a multi-layered object. The method may include (i) receiving or determining milling parameters related to a milling process, the milling parameters may include at least two out of (a) a defocus strength, (b) a duration of the milling process, (c) a bias voltage supplied to an objective lens during the milling process, (d) an ion beam energy, and (e) an ion beam current density, and (ii) forming a crater by applying the milling process while maintaining the milling parameters, wherein the applying of the milling process includes directing a defocused ion beam on the multi-layered object.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS ISRAEL LTD9 OPPENHEIMER STREET PARK RABIN REHOVOT 7670109

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Zur, Yehuda Rehovot, IL 25 15

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