Stage device, minute operation device, and method of controlling same
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Sep 13, 2022
Grant Date -
Jun 11, 2020
app pub date -
Dec 4, 2019
filing date -
Dec 6, 2018
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A stage device capable of performing piercing vibration and translational driving by using one actuator, and performing very low-speed driving in the translational driving with high accuracy. The stage device includes an X stage having a vibration actuator that includes an vibration element and a contact body, one of which is a movable body connected to an object to be driven, and drives the object to be driven in an X-axis direction, and a control section that controls driving of the vibration actuator. The control section causes two-phase AC voltages to be applied to an electromechanical energy conversion element to thereby excite predetermined vibrations in the vibration element, to drive the vibration actuator by switching between a movement mode for moving the object to be driven in the X-axis direction and a vibration mode for vibrating the object to be driven in the X-axis direction.
First Claim
Other Claims data not available
Family
International Classification(s)
- 2019 Application Filing Year
- C12M Class
- 972 Applications Filed
- 479 Patents Issued To-Date
- 49.28 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 1 Citation Count
- C12M Class
- 80.26 % this patent is cited more than
- 3 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 3.5 Year Payment | $1600.00 | $800.00 | $400.00 | Mar 13, 2026 |
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Mar 13, 2030 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Mar 13, 2034 |
