Substrate processing apparatus and storage medium having program stored therein
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United States of America Patent
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Sep 6, 2022
Grant Date -
Nov 22, 2018
app pub date -
May 17, 2018
filing date -
May 18, 2017
priority date (Note) -
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Abstract
A substrate processing apparatus for processing a substrate includes a setting device that sets a plurality of recipe items including operation conditions of the substrate processing apparatus and a recipe generating device that acquires a plurality of recipe models obtained by changing values of the plurality of recipe items and experimenting or simulating a processing result of the substrate and analyzes the plurality of recipe models to generate a recipe, the recipe generating device combining a part or all of the plurality of recipe models to generate the recipe such that a calculation value of a processing result of the substrate by the recipe satisfies a predetermined condition.
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