MEMS-based nanoindentation force sensor with electro-thermal tip heating
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United States of America Patent
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Sep 6, 2022
Grant Date -
Aug 6, 2020
app pub date -
Jan 7, 2020
filing date -
Feb 4, 2019
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Abstract
A MEMS microforce sensor for high temperature nanoindentation is used for determining a mechanical property of a sample by sensing a deflection and measuring a force. The MEMS microforce sensor includes at least a cold movable body, a heatable movable body, a heating resistor and capacitor electrodes. The cold movable body and the heatable movable body are mechanically connected by at least one bridge and the capacitor electrodes measure a force applied on the sample by sensing the deflection of the cold movable body relative to the outer frame by a change of electrical capacitance.
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