Methods of inspecting samples with multiple beams of charged particles

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United States of America Patent

PATENT NO 11430631
APP PUB NO 20200227233A1
SERIAL NO

16833463

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Abstract

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Disclosed herein is a method comprising: generating a plurality of probe spots on a sample by a plurality of beams of charged particles; while scanning the plurality of probe spots across a region on the sample, recording from the plurality of probe spots a plurality of sets of signals respectively representing interactions of the plurality of beams of charged particles and the sample; generating a plurality of images of the region respectively from the plurality of sets of signals; and generating a composite image of the region from the plurality of images.

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Patent Owner(s)

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ASML NETHERLANDS B VDE RUN 6501 VELDHOVEN NL-5504 DR

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fang, Wei Milpitas, US 197 903
Jau, Jack Los Altos Hills, US 55 721
Liu, Kuo-Shih Fremont, US 13 85
Liu, Xuedong San Jose, US 123 844

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