Low profile high speed load pull tuner system
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United States of America Patent
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Aug 30, 2022
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N/A
app pub date -
Apr 30, 2020
filing date -
Apr 30, 2020
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Abstract
A load-pull test system uses controller, interface, calibration method and at least one low profile, two-probe, slide screw impedance tuner; the tuner probes share the same slabline; they are inserted anti-diametrical at fixed depth (distance from the center conductor) from both sides into the channel and move only horizontally along the slabline. The tuner does not have adjustable high precision vertical axes controlling the penetration of the probes and its low profile is optimized for on-wafer operations. The carriages holding the probes are moved at high speed along the slabline using linear electric actuators. An efficient de-embedding calibration method serves speeding up additionally the measurement procedure.
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