Bulk-acoustic wave resonator and method for manufacturing the same
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United States of America Patent
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Aug 23, 2022
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N/A
app pub date -
Mar 18, 2019
filing date -
Sep 18, 2018
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Abstract
A bulk-acoustic wave resonator includes a substrate, a first layer, a second layer, a membrane layer, and a resonance portion. The substrate includes a substrate protection layer. The first layer is disposed on the substrate protection layer. The second layer is disposed outside of the first layer. The membrane layer forms a cavity with the substrate protection layer and the first layer. The resonance portion is disposed on the membrane layer. Either one or both of the substrate protection layer and the membrane layer includes a protrusion disposed in the cavity.
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