Vibration isolation system and lithographic apparatus

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11422477
APP PUB NO 20210080835A1
SERIAL NO

17053021

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Abstract

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The invention provides a vibration isolation system (IS), comprising a piston (402) to carry a payload, a connecting member (410), a spring (404) and a flexible member (408). The spring is arranged to support the piston along a direction with a positive stiffness. The flexible member is arranged to apply a force to the piston along the direction via the connecting member with a negative stiffness.

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Patent Owner(s)

Patent OwnerAddress
ASML NETHERLANDS B VDE RUN 6501 VELDHOVEN NL - 5504 DR

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
De, Hoon Cornelius Adrianus Lambertus Eindhoven, NL 22 109
Jacobs, Roy Hendrikus Emilie Maria Eindhoven, NL 1 1
Starreveld, Jeroen Pieter Knegsel, NL 14 88
Vermeulen, Johannes Petrus Martinus Bernardus Leende, NL 81 430

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