Laser produced plasma light source having a target material coated on a cylindrically-symmetric element
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Aug 16, 2022
Grant Date -
May 6, 2021
app pub date -
Jan 11, 2021
filing date -
Nov 16, 2015
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
The present disclosure is directed to laser produced plasma light sources having a target material, such as xenon, that is coated on the outer surface of a drum. Bearing systems rotate the drum that have structures for reducing leakage of contaminant material and/or bearing gas into the LPP chamber. Injection systems are disclosed for coating and replenishing target material on the drum. Wiper systems are disclosed for preparing the target material surface on the drum, e.g. smoothing the target material surface. Systems for cooling and maintaining the temperature of the drum and a housing overlying the drum are also disclosed.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully