Atomic beam generator, bonding apparatus, surface modification method, and bonding method
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Aug 9, 2022
Grant Date -
Feb 4, 2021
app pub date -
Oct 16, 2020
filing date -
Apr 26, 2018
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
An atomic beam generator includes a cathode constituted as a housing having an emission surface provided with an irradiation port through which an atomic beam is emissive; an anode disposed inside the cathode to generate plasma between the cathode and the anode; and a magnetic field generating unit including a first magnetic field generating unit that generates a first magnetic field and a second magnetic field generating unit that generates a second magnetic field, and guiding positive ions produced in the cathode to the emission surface by generating, in the cathode, the first magnetic field and the second magnetic field both parallel to the emission surface such that a magnetic field direction is leftward in the first magnetic field and is rightward in the second magnetic field when viewed from an emission surface side on condition of the first magnetic field being positioned above the second magnetic field.
First Claim
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International Classification(s)
- 2020 Application Filing Year
- H05H Class
- 282 Applications Filed
- 147 Patents Issued To-Date
- 52.13 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 0 Citation Count
- H05H Class
- 0 % this patent is cited more than
- 3 Age
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