Line narrowing module, gas laser apparatus, and electronic device manufacturing method
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United States of America Patent
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Aug 9, 2022
Grant Date -
Oct 28, 2021
app pub date -
Jul 9, 2021
filing date -
Feb 26, 2019
priority date (Note) -
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status (Latency Note)
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Abstract
A line narrowing module includes a prism including an entrance side surface that light enters, an exit side surface from which the light is emitted, and a bottom surface, and configured to wavelength-disperse the light having entered the entrance side surface and to emit the light from the exit side surface; a holder portion having a stationary surface on which the bottom surface of the prism is secured; a rotary mechanism portion including a rotary stage on which the holder portion is secured, the rotary stage being configured to rotate the prism around an axis perpendicular to a dispersion plane of the light emitted from the prism; a drive unit configured to rotate the rotary stage; and a grating configured to reflect the light emitted from the prism, centroids of the prism, the holder portion, and the rotary stage being located on the axis.
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