Etching composition for thin film containing silver, method for forming pattern and method for manufacturing a display device using the same

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United States of America Patent

PATENT NO 11407943
APP PUB NO 20200148950A1
SERIAL NO

16575593

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Abstract

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An etching composition for a silver-containing thin film includes an inorganic acid compound, a carboxylic acid compound, a sulfonic acid compound, a glycol compound, a nitrogen-containing dicarbonyl compound, a metal-based oxidizer, and water.

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Patent Owner(s)

Patent OwnerAddress
SAMSUNG DISPLAY CO LTD95 SAMSUNG 2-RO GIHEUNG-GU YONGIN-SI GYEONGGI-DO 446-711

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kim, Gyu-Po Yongin-si, KR 9 31
Kim, Jinseock Yongin-si, KR 10 19
Kim, Kitae Yongin-si, KR 265 3303
Lee, Dae-Woo Yongin-si, KR 72 573
Lee, Sang-Hyuk Yongin-si, KR 37 572
Park, Jonghee Yongin-si, KR 20 52
Shin, Hyun-Cheol Yongin-si, KR 21 124

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