Semiconductor device including a repeater/buffer at upper metal routing layers and methods of manufacturing the same

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United States of America Patent

PATENT NO 11404405
APP PUB NO 20200381414A1
SERIAL NO

16997732

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Abstract

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A semiconductor device includes a series of metal routing layers and a complementary pair of planar field-effect transistors (FETs) on an upper metal routing layer of the metal routing layers. The upper metal routing layer is M3 or higher. Each of the FETs includes a channel region of a crystalline material. The crystalline material may include polycrystalline silicon. The upper metal routing layer M3 or higher may include cobalt.

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Patent Owner(s)

Patent OwnerAddress
SAMSUNG ELECTRONICS CO LTDSUWON-SI 16677

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bowen, Chris Austin, US 13 81
Obradovic, Borna J Leander, US 59 1033
Rakshit, Titash Austin, US 92 1542
Rodder, Mark S Dallas, US 160 3160
Wang, Wei-E Austin, US 34 438

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