Scanning probe microscope and a method for operating thereof

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United States of America Patent

PATENT NO 11402404
APP PUB NO 20210311090A1
SERIAL NO

17266066

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Abstract

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A method of operating a scanning probe microscope, wherein a control loop is provided which is configured for controlling one or more feedback parameters of the scanning probe microscope. One or more system identification measurements are performed during operation of the control loop, wherein during the one or more system identification measurements an excitation signal with a plurality of frequency components is introduced in the control loop and a resulting response signal indicative of a cantilever displacement or a stage-sample distance between a sensor device and a sample is measured. A model response function is identified using said excitation signal and said resulting response signal, wherein one or more settings and/or input signals are adapted in the control loop based on the identified model response function. The scanning probe microscope is used for characterization of the sample using the adapted one or more settings and/or input signals.

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Patent Owner(s)

Patent OwnerAddress
NEDERLANDSE ORGANISATIE VOOR TOEGEPAST-NATUURWETENSCHAPPELIJK ONDERZOEK TNOANNA VAN BUERENPLEIN 1 'S-GRAVENHAGE 2595 DA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Biemond, Jan Jacobus Benjamin Barendrecht, NL 4 0
Kramer, Lukas Berkel en Rodenrijs, NL 3 1
Winters, Jasper Nieuw-Vennep, NL 10 2

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