Fluid supply apparatus
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United States of America Patent
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Aug 2, 2022
Grant Date -
Nov 12, 2020
app pub date -
Aug 29, 2018
filing date -
Sep 6, 2017
priority date (Note) -
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status (Latency Note)
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Abstract
In a first fluid circulation device, a heat exchanger, a tank that stores a first fluid liquefied by the heat exchanger, a first fluid pump that pumps the first fluid stored in the tank, a heater that heats the first fluid pumped from the first fluid pump, and a first fluid supply unit to which the first fluid is supplied from the heater are connected by a first pipe. A second fluid circulation device includes a cooler that cools a second fluid, causes the second fluid having been cooled by the cooler to circulate through a second pipe, and returns the second fluid to the cooler. The second pipe is connected to the heat exchanger and is connected to the tank and the first fluid pump, and the second fluid cools the first fluid in the heat exchanger, the tank, and the first fluid pump.
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