Fluid heater, fluid control apparatus, and production method for fluid heater

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United States of America Patent

PATENT NO 11402124
SERIAL NO

16583525

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Importance

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Abstract

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A fluid heater includes: a passage member having a passage formed therein; a heater for heating the passage member; a fixing member for fixing the passage member to a fluid control device; and a connection member connected to the passage member so as to allow fluid to flow into the passage member. The passage has a helical shape.

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Patent Owner(s)

Patent OwnerAddress
FUJIKIN INCORPORATEDOSAKA

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chiba, Taiji Osaka, JP 6 22
Inada, Toshiyuki Osaka, JP 19 34
Okabe, Tsuneyuki Yamanashi, JP 50 1149
Sato, Tatsuhiko Osaka, JP 7 19
Yakushijin, Tadayuki Osaka, JP 49 181
Yamaji, Michio Osaka, JP 158 3238

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