Coating nozzle, coating device and corresponding coating method
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United States of America Patent
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Aug 2, 2022
Grant Date -
Jun 11, 2020
app pub date -
Jan 17, 2018
filing date -
Jul 28, 2017
priority date (Note) -
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Abstract
The present disclosure proposes a coating nozzle, a coating device and a corresponding coating method. The nozzle includes: a first reactant spout configured to spray a first reactant; a second reactant spout configured to spray a second reactant; and a first air curtain spout configured to spray shielding gas, so that the sprayed shielding gas forms an air curtain which isolates the first reactant from the second reactant. The device includes: one or more coating nozzles described above; and a transport mechanism configured to transport an object to be coated, so that the object to be coated sequentially passes through a first reaction region of the first reactant and a second reaction region of the second reactant for each of the one or more nozzles.
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