Fluid control device and semiconductor manufacturing apparatus
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United States of America Patent
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Jul 26, 2022
Grant Date -
May 6, 2021
app pub date -
Sep 30, 2020
filing date -
Oct 31, 2019
priority date (Note) -
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status (Latency Note)
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Abstract
A fluid control device includes a first block row and a second block row each including a plurality of joint blocks having a width of the standard size and arranged along a first directions, the first block row and the second block row being arranged at predetermined intervals in the second directions perpendicular to the first directions, wherein each of the plurality of joint blocks constituting the first block row has a large diameter flow path for forming a single line, and each of the plurality of joint blocks constituting the second block row has a smaller diameter flow path than the large diameter flow path for forming the first line and the second line.
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