Method for selective delamination and transfer of thin film using liquid platform
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jul 26, 2022
Grant Date -
Dec 10, 2020
app pub date -
Jan 8, 2020
filing date -
Jun 7, 2019
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
Provided is a selective transfer method including depositing a thin film on a substrate; patterning the thin film using a laser or a tool to acquire a thin film of a target pattern; masking the thin film of the target pattern; selectively controlling a surface wettability through surface treatment of the masked thin film; delaminating the thin film of the target pattern by dipping a surface of the thin film with a wettability changed in response to a completion of the selective surface treatment into a liquid material and by applying a crack opening force capable of delaminating an interface between the thin film and the substrate; and immersing a target substrate into the liquid material when the thin film of the target pattern is floating in the liquid material and then scoop-up transferring the floating thin film of the target pattern.
First Claim
Other Claims data not available
Family
International Classification(s)
- 2020 Application Filing Year
- H01L Class
- 29783 Applications Filed
- 21134 Patents Issued To-Date
- 70.96 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 0 Citation Count
- H01L Class
- 0 % this patent is cited more than
- 3 Age
Maintenance Fees
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