Scanning probe microscope and setting method thereof
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United States of America Patent
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Jul 19, 2022
Grant Date -
N/A
app pub date -
Mar 16, 2021
filing date -
Mar 18, 2020
priority date (Note) -
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status (Latency Note)
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Abstract
Provided are a scanning probe microscope and a setting method thereof that contribute to a reduction in the time taken for measuring. The scanning probe microscope includes: a movement driving unit capable of moving a cantilever and a sample relatively in at least a z direction; and a control device operating an approach operation of making the cantilever and the sample approach to each other at a predetermined speed by controlling the movement driving unit, and stopping the approach operation when it is determined that the probe and the sample are in contact with each other, wherein the predetermined speed is set such that when the control for stopping the approach operation is performed, force applied to the sample due to contact between the probe and the sample does not exceed a preset first force.
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