Fluid control apparatus
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United States of America Patent
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Jul 19, 2022
Grant Date -
Nov 12, 2020
app pub date -
Jul 30, 2020
filing date -
Feb 16, 2018
priority date (Note) -
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status (Latency Note)
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Abstract
A fluid control apparatus includes a valve and a pump. The valve has a valve chamber. The first main plate has a first aperture through which the valve chamber communicates with the outside, and the second main plate has a second aperture through which the valve chamber communicates with the outside. The valve further includes a valve diaphragm disposed inside the valve chamber. The valve diaphragm is configured to switch the communication state. The pump includes a piezoelectric device. The pump has a pump chamber. The pump chamber communicates with the valve chamber through the second aperture. In addition, in flexural vibration of the vibration unit, a frequency coefficient of the first main plate is greater than a frequency coefficient of the second main plate.
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