Fluid control device
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United States of America Patent
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Jul 19, 2022
Grant Date -
Jun 25, 2020
app pub date -
Jul 20, 2018
filing date -
Jul 25, 2017
priority date (Note) -
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Abstract
In order to appropriately control temperatures of fluid heating sections that are maintained at different temperatures, the fluid control device (100) comprises a plurality of fluid heating sections (1) connected to each other and each having a flow path or a fluid accommodating portion inside, heaters (10) configured to heat each of the plurality of fluid heating sections to different temperatures, and heat insulating members (13, 13′) disposed between adjacent fluid heating sections.
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